RUcore Resource Object
RUcore Resource Object
PDF-1(1.50 MB)
TitleFlow structure and heat transfer in an impinging jet CVD reactor
NameMemon, Nasir (author), Jaluria, Yogesh (chair), Tse, Stephen (internal member), Diez, F. Javier (internal member), Rutgers University, Graduate School - New Brunswick,
Degree Date2009-10
Date Created2009
SubjectMechanical and Aerospace Engineering,
Chemical vapor deposition,
Chemical reactors
DescriptionA detailed experimental study is undertaken to investigate the flow structure and heat transfer in an impinging jet Chemical Vapor Deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum-driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operational parameters such as substrate temperature and inlet velocity. In addition, different reactor geometries with varying inlet length and height between the substrate and inlet are included in the study. Experimental results obtained from the study provide information on the temperature distribution, heat transfer rates, and flow field. Such results validate the operation of the reactor at atmospheric pressure and provide valuable insight into future design of impinging jet CVD reactors.
NoteM.S.
NoteIncludes bibliographical references (p. 64-67)
Noteby Nasir Memon
Genretheses
Persistent URLhttp://hdl.rutgers.edu/1782.2/rucore10001600001.ETD.000051878
Languageeng
CollectionGraduate School - New Brunswick Electronic Theses and Dissertations
Organization NameRutgers, The State University of New Jersey
RightsThe author owns the copyright to this work
Statistical Profile